BioengineeringbioRxiv
Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon
S. Yadavali, D. Lee, D. Issadore
This paper introduces a robust fabrication method for three-dimensional microfluidic chips with a high density of TSVs, enabling a 100% increase in droplet generators on a single wafer.
DOI 10.1038/s41598-019-48515-4